Proceedings of the First International Symposium on Advanced Materials for ULSI

Author(s)

• International Symposium on Advanced Materials for ULSI
• Scott, Martin (Martin P.)
• 赤坂, 洋一 アカサカ, ヨウイチ
• Reif, Rafael
• Electrochemical Society. Electronics Division
• Electrochemical Society. Dielectrics and Insulation Division
• Electrochemical Society. High Temperature Materials Division

Bibliographic Information

Proceedings of the First International Symposium on Advanced Materials for ULSI

edited by Martin Scott, Yoichi Akasaka, Rafael Reif

（Proceedings / [Electrochemical Society], v. 88-19）

Electrochemical Society, c1988

Other Title

First International Symposium on Advanced Materials for ULSI

Advanced materials for ULSI

Note

Includes bibliographical references and index

Sponsored by: Electronics, Dielectrics and Insulation, and High Temperature Materials Divisions

"... at the 173rd meeting of the Electrochemical Society in Atlanta" -- on pref

Details

• NCID: BA84961873
• LCCN: 88082409
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Pennington, NJ
• Pages/Volumes: vi, 246 p.
• Size: 23 cm
• Classification:
  • LCC : TK7874
  • DC20 : 621.39/5
• Subject Headings:
  • LCSH : Integrated circuits -- Ultra large scale integration -- Congresses
• Parent Bibliography ID:
  • BA01323290