Proceedings of the First International Symposium on Advanced Materials for ULSI

著者

• International Symposium on Advanced Materials for ULSI
• Scott, Martin (Martin P.)
• 赤坂, 洋一 アカサカ, ヨウイチ
• Reif, Rafael
• Electrochemical Society. Electronics Division
• Electrochemical Society. Dielectrics and Insulation Division
• Electrochemical Society. High Temperature Materials Division

書誌事項

Proceedings of the First International Symposium on Advanced Materials for ULSI

edited by Martin Scott, Yoichi Akasaka, Rafael Reif

（Proceedings / [Electrochemical Society], v. 88-19）

Electrochemical Society, c1988

タイトル別名

First International Symposium on Advanced Materials for ULSI

Advanced materials for ULSI

注記

Includes bibliographical references and index

Sponsored by: Electronics, Dielectrics and Insulation, and High Temperature Materials Divisions

"... at the 173rd meeting of the Electrochemical Society in Atlanta" -- on pref

詳細情報

• NII書誌ID(NCID): BA84961873
• LCCN: 88082409
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Pennington, NJ
• ページ数/冊数: vi, 246 p.
• 大きさ: 23 cm
• 分類:
  • LCC : TK7874
  • DC20 : 621.39/5
• 件名:
  • LCSH : Integrated circuits -- Ultra large scale integration -- Congresses
• 親書誌ID:
  • BA01323290