Proceedings of the symposia on reliability of semiconductor devices and interconnection and multilevel metallization, interconnection, and contact technologies

著者

• Rathore, Harzara S.
• Schwartz, G. C.
• Susko, R. A. (Robin A.)
• Electrochemical Society. Dielectrics and Insulation Division
• Electrochemical Society. Electronics Division

書誌事項

Proceedings of the symposia on reliability of semiconductor devices and interconnection and multilevel metallization, interconnection, and contact technologies

edited by Harzara S. Rathore, Geraldine C. Schwartz, Robin A. Susko ; [sponsored by] Dielectrics and Insulation and Electronics divisions

（Proceedings / [Electrochemical Society], v. 89-6）

Electrochemical Society, c1989

タイトル別名

Reliability of semiconductor devices and interconnection and multilevel metallization, interconnection, and contact technologies

注記

Includes bibliographical references and indexes

"... held during the Fall meeting of the Electrochemical Society, October 9 to 14, 1988"--on pref

詳細情報

• NII書誌ID(NCID): BA84982807
• LCCN: 89083803
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Pennington, NJ
• ページ数/冊数: viii, 495 p.
• 大きさ: 23 cm
• 分類:
  • LCC : TK7871.85
  • DC20 : 621.381/52
• 件名:
  • LCSH : Semiconductors -- Reliability -- Congresses
  • LCSH : Integrated circuits -- Very large scale integration -- Design and construction -- Congresses
  • LCSH : Metallizing -- Congresses
• 親書誌ID:
  • BA01323290