Proceedings of the Third Symposium on Automated Integrated Circuits Manufacturing

Author(s)

• Symposium on Automated Integrated Circuits Manufacturing
• Anthony, Joseph B.
• Electrochemical Society. Electronics Division
• Electrochemical Society. Dielectrics and Insulation Division

Bibliographic Information

Proceedings of the Third Symposium on Automated Integrated Circuits Manufacturing

edited by Joseph B. Anthony ; assistant editors, Mihir Parikh, Vaughn Akins, Robert Miller

（Proceedings / [Electrochemical Society], v. 88-13）

Electrochemical Society, c1988

Other Title

Automated integrated circuits manufacturing

Note

Includes bibliographical references and indexes

Co-sponsored by: the Electronics and Dielectrics and Insulation Divisions

"... held October 18-23, 1987 in Honolulu, Hawaii" -- on pref

Details

• NCID: BA84987414
• LCCN: 88081197
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Pennington, NJ
• Pages/Volumes: viii, 484 p.
• Size: 23 cm
• Classification:
  • LCC : TK7874
  • DC19 : 621.381/73
• Subject Headings:
  • LCSH : Integrated circuits -- Design and construction -- Data processing -- Congresses
• Parent Bibliography ID:
  • BA01323290