Proceedings of the Third Symposium on Automated Integrated Circuits Manufacturing

著者

• Symposium on Automated Integrated Circuits Manufacturing
• Anthony, Joseph B.
• Electrochemical Society. Electronics Division
• Electrochemical Society. Dielectrics and Insulation Division

書誌事項

Proceedings of the Third Symposium on Automated Integrated Circuits Manufacturing

edited by Joseph B. Anthony ; assistant editors, Mihir Parikh, Vaughn Akins, Robert Miller

（Proceedings / [Electrochemical Society], v. 88-13）

Electrochemical Society, c1988

タイトル別名

Automated integrated circuits manufacturing

注記

Includes bibliographical references and indexes

Co-sponsored by: the Electronics and Dielectrics and Insulation Divisions

"... held October 18-23, 1987 in Honolulu, Hawaii" -- on pref

詳細情報

• NII書誌ID(NCID): BA84987414
• LCCN: 88081197
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Pennington, NJ
• ページ数/冊数: viii, 484 p.
• 大きさ: 23 cm
• 分類:
  • LCC : TK7874
  • DC19 : 621.381/73
• 件名:
  • LCSH : Integrated circuits -- Design and construction -- Data processing -- Congresses
• 親書誌ID:
  • BA01323290