Microelectronic device technology II : 23-24 September, 1998, Santa Clara, California

著者

• Microelectronic Device Technology
• Burnett, David
• Wristers, Dirk
• Tsuchiya, Toshiaki
• Society of Photo-optical Instrumentation Engineers
• Solid State Technology (Organization)

書誌事項

Microelectronic device technology II : 23-24 September, 1998, Santa Clara, California

David Burnett, Dirk Wristers, Toshiaki Tsuchiya, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, Solid State Technology ... [et al.]

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 3506）

SPIE, c1998

注記

Includes bibliographical references and author index

内容説明・目次

内容説明

A collection of 40 papers on microelectronic device technology. It addresses: dielectrics/gate technology; source/drain junctions and salicide; integration and manufacturability; and other issues.

「Nielsen BookData」 より

詳細情報

• NII書誌ID(NCID): BA85960118
• ISBN:
  • 0819429651
• LCCN: 99184109
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Bellingham, Washington
• ページ数/冊数: vii, 356 p.
• 大きさ: 28 cm
• 分類:
  • LCC : TK7871.85
  • DC21 : 621.3815/2
• 件名:
  • LCSH : Semiconductors Congresses
  • LCSH : Semiconductors -- Design and construction Congresses
  • LCSH : Microelectronics Congresses
• 親書誌ID:
  • BA0022700X