Challenges in process integration and device technology : 18-19 September 2000, Santa Clara, USA

Author(s)

• Burnett, David
• Kimura, Shiníchiro
• Singh, Bhanwar
• Society of Photo-optical Instrumentation Engineers
• Solid State Technology (Organization)
• Electrochemical Society
• American Vacuum Society

Bibliographic Information

Challenges in process integration and device technology : 18-19 September 2000, Santa Clara, USA

David Burnett, Shinʾichiro Kimura, Bhanwar Singh, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organizations, SolidState Technology, the Electrochemical Society, [and] AVS--American Vacuum Society (USA)

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 4181）

SPIE, c2000

Note

Includes bibliographical references and index

Details

• NCID: BA85986858
• ISBN:
  • 0819438421
• LCCN: 2002275088
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Bellingham, Wash., USA
• Pages/Volumes: ix, 344 p.
• Size: 28 cm
• Classification:
  • LCC : TA1660
  • DC21 : 621.3815/31
• Subject Headings:
  • LCSH : Integrated optics -- Congresses
  • LCSH : Microlithography -- Congresses
  • LCSH : Semiconductors -- Congresses
  • LCSH : Optical interconnects -- Congresses
  • LCSH : Microelectronics -- Congresses
• Parent Bibliography ID:
  • BA0022700X