Design, test, integration, and packaging of MEMS/MOEMS 2002 : 6-8 May, 2002, Cannes, France

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書誌事項

Design, test, integration, and packaging of MEMS/MOEMS 2002 : 6-8 May, 2002, Cannes, France

Bernard Courtois ... [et al.] chairs/editors ; sponsored by CNRS-INPG-UJF (France) ... [et al.]

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 4755）

SPIE, c2002

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注記

Includes bibliographical references and index

内容説明・目次

内容説明

This volume examines the design, test, integration and packaging of MEMS/MOEMS 2002.

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    SPIE -- the International Society for Optical Engineering

    SPIE -- the International Society for Optical Engineering

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