Device and process technologies for MEMS and microelectronics : 27-29 October 1999, Royal Pines Resort, Queensland, Australia

Author(s)

• Device and Process Technologies for MEMS and Microelectronics (Conference)
• Chau, Kevin
• Dimitrijev, Sima
• Society of Photo-optical Instrumentation Engineers
• Institution of Radio and Electronics Engineers, Australia
• Queensland. Government State Development
• Griffith University Microelectronics Engineering Society

Bibliographic Information

Device and process technologies for MEMS and microelectronics : 27-29 October 1999, Royal Pines Resort, Queensland, Australia

Kevin Chau, Sima Dimitrijev, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, IREE Society (Australia), [and] Queensland Government State Development (Australia) ; cooperating organizations, LeGUMES--the Griffith University Microelectronics Engineering Society (Australia) ... [et al.]

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 3892）

SPIE, c1999

Note

Includes bibliographical references and index

Description and Table of Contents

Description

This selection of papers on microelectromechanical systems (MEMS) and microelectronics explores the device and process technologies used in these disciplines.

by "Nielsen BookData"

Details

• NCID: BA86012776
• ISBN:
  • 0819434930
• LCCN: 00702718
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Bellingham, Wash., USA
• Pages/Volumes: vii, 394 p.
• Size: 28 cm
• Classification:
  • LCC : TK7875
  • DC21 : 621.381
• Subject Headings:
  • LCSH : Microelectromechanical systems -- Congresses
  • LCSH : Photon detectors -- Design and construction -- Congresses
  • LCSH : Photomechanical processes -- Congresses
  • LCSH : Photolithography -- Congresses
• Parent Bibliography ID:
  • BA0022700X