Device and process technologies for MEMS and microelectronics : 27-29 October 1999, Royal Pines Resort, Queensland, Australia

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書誌事項

Device and process technologies for MEMS and microelectronics : 27-29 October 1999, Royal Pines Resort, Queensland, Australia

Kevin Chau, Sima Dimitrijev, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, IREE Society (Australia), [and] Queensland Government State Development (Australia) ; cooperating organizations, LeGUMES--the Griffith University Microelectronics Engineering Society (Australia) ... [et al.]

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 3892）

SPIE, c1999

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Includes bibliographical references and index

内容説明・目次

内容説明

This selection of papers on microelectromechanical systems (MEMS) and microelectronics explores the device and process technologies used in these disciplines.

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    SPIE -- the International Society for Optical Engineering

    SPIE -- the International Society for Optical Engineering

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