Device and process technologies for MEMS, microelectronics, and photonics III : 10-12 December 2003, Perth, Australia

著者

• Device and Process Technologies for MEMS, Microelectronics, and Photonics (Conference)
• Chiao, Jung-Chih
• Society of Photo-optical Instrumentation Engineers
• University of Western Australia
• Defence Science and Technology Organisation (Australia)

書誌事項

Device and process technologies for MEMS, microelectronics, and photonics III : 10-12 December 2003, Perth, Australia

Jung-Chih Chiao ... [et al.], chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cosponsored by the University of Western Australia (Australia) [and] Defence Science and Technology (Australia)

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 5276）

SPIE, c2004

タイトル別名

Device and process technologies for MEMS and microelectronics

注記

Includes bibliographical references and index

内容説明・目次

内容説明

Proceedings of SPIE present the original research papers presented at SPIE conferences and other high-quality conferences in the broad-ranging fields of optics and photonics. These books provide prompt access to the latest innovations in research and technology in their respective fields. Proceedings of SPIE are among the most cited references in patent literature.

「Nielsen BookData」 より

詳細情報

• NII書誌ID(NCID): BA86012925
• ISBN:
  • 081945169X
• LCCN: 2004304163
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Bellingham, Wash.
• ページ数/冊数: xxxiv, 566 p.
• 大きさ: 28 cm
• 分類:
  • LCC : TK7875
  • DC22 : 621.381
• 件名:
  • LCSH : Microelectromechanical systems -- Congresses
  • LCSH : Photonics -- Congresses
  • LCSH : Photomechanical processes -- Congresses
  • LCSH : Photolithography -- Congresses
• 親書誌ID:
  • BA0022700X