Surfaces, interfaces, and thin films for microelectronics

Author(s)

• Irene, Eugene A.

Bibliographic Information

Surfaces, interfaces, and thin films for microelectronics

Eugene A. Irene

Wiley-Interscience, c2008

• : hard

Note

Includes bibliographical references and index

Details

• NCID: BA86791865
• ISBN:
  • 9780470174470
• LCCN: 2007024692
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Hoboken, N.J.
• Pages/Volumes: xiii, 515 p.
• Size: 25 cm
• Classification:
  • LCC : QD506
  • DC22 : 621.381
• Subject Headings:
  • LCSH : Surface chemistry
  • LCSH : Interfaces (Physical sciences)
  • LCSH : Thin films
  • LCSH : Microelectronics -- Materials