Thermal transport for applications in micro/nanomachining
著者
書誌事項
Thermal transport for applications in micro/nanomachining
（Microtechnology and MEMS）
Springer, c2008
- タイトル別名
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Thermal transport for applications in nanomachining
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注記
Cover title: Thermal transport for applications in nanomachining
Includes bibliographical references (p. [221]-228) and index
内容説明・目次
内容説明
Beginning with an overview of nanomachining, this monograph introduces the relevant concepts from solid-state physics, thermodynamics, and lattice structures. It then covers modeling of thermal transport at the nanoscale and details simulations of different processes relevant to nanomachining. The final chapter summarizes the important points and discusses directions for future work to improve the modeling of nanomachining.
目次
Transport Equations.- Modeling of Transport Equations via MC Methods.- Modeling of e-Beam Transport.- Thermal Conduction Coupled with e-Beam Transport.- Two-Temperature Model Coupled with e-Beam Transport.- Thermal Conduction with Electron Flow/Ballistic Behavior.- Parallel Computations for Two-Temperature Model.- Molecular Dynamics Simulations.- Concluding Remarks.
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