CMOS gate-stack scaling--materials, interfaces and reliability implications : symposium held April 14-16, 2009, San Francisco, California, U.S.A.
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書誌事項
CMOS gate-stack scaling--materials, interfaces and reliability implications : symposium held April 14-16, 2009, San Francisco, California, U.S.A.
（Materials Research Society symposium proceedings, v. 1155）
Materials Research Society, c2009
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注記
Other editors: Bill Taylor, H. Rusty Harris, Jeffery W. Butterbaugh, Willy Rachmady
Includes bibliographical references and indexes
"..., 'CMOS gate-stack scaling--materials, interfaces and reliability implications,' held April 14-16 at the 2009 MRS Spring Meeting in San Francisco, California."--Pref.
