ULSI process integration 7

Author(s)

Bibliographic Information

ULSI process integration 7

editors, C. Claeys ... [et al.] ; sponsoring divisions, Electronics and Photonics

（ECS transactions, vol. 41, no. 7）

Electrochemical Society, c2011

  • : hardcover

Other Title

Dielectric and semiconductor materials, devices, and processing

Available at  / 2 libraries

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Note

Includes bibliographical references and index

"The issue of ECS Transactions includes papers that were presented at the Seventh Symposium on ULSI Process Integration held in Boston, MA at the 220th Meeting of the Electrochemical Society, October 9-14, 2011." -- preface

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Details

  • NCID
    BB07417317
  • ISBN
    • 9781566779074
  • Country Code
    us
  • Title Language Code
    eng
  • Text Language Code
    eng
  • Place of Publication
    Pennington, N.J.
  • Pages/Volumes
    ix, 417 p.
  • Size
    23 cm
  • Parent Bibliography ID
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