ULSI process integration 7

著者

• Claeys, Cor L.
• Electrochemical Society. Meeting
• Electrochemical Society

書誌事項

ULSI process integration 7

editors, C. Claeys ... [et al.] ; sponsoring divisions, Electronics and Photonics

（ECS transactions, vol. 41, no. 7）

Electrochemical Society, c2011

• : hardcover

タイトル別名

Dielectric and semiconductor materials, devices, and processing

注記

Includes bibliographical references and index

"The issue of ECS Transactions includes papers that were presented at the Seventh Symposium on ULSI Process Integration held in Boston, MA at the 220th Meeting of the Electrochemical Society, October 9-14, 2011." -- preface

詳細情報

• NII書誌ID(NCID): BB07417317
• ISBN:
  • 9781566779074
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Pennington, N.J.
• ページ数/冊数: ix, 417 p.
• 大きさ: 23 cm
• 親書誌ID:
  • BA78566502