Material science and MEMS production : selected, peer reviewed papers from the 2014 Conference on MEMS and Nanotechnology (MEMS-NANO 2014), January 23-24, 2014, Shenzhen, China

Author(s)

    • Conference on MEMS and Nanotechnology
    • Liu, Changhui

Bibliographic Information

Material science and MEMS production : selected, peer reviewed papers from the 2014 Conference on MEMS and Nanotechnology (MEMS-NANO 2014), January 23-24, 2014, Shenzhen, China

edited by Changhui Liu

(Advanced materials research, v. 901)

Trans Tech Publications, c2014

  • : pbk

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Note

Includes bibliographical references and indexes

Description and Table of Contents

Description

Collection of selected, peer reviewed papers from the 2014 Conference on MEMS and Nanotechnology (MEMS-NANO 2014), January 23-24, 2014, Shenzhen, China. The 19 papers are grouped as follows: Chapter 1: Materials Science, Processing and Application, Chapter 2: MEMS Design and Production

Table of Contents

Preface and Organizing Committee Chapter 1: Materials Science, Processing and Application Surface Effects on the Buckling of Nanowires Based on Modified Core-Shell Model A Comparison Study of Fire Resistance of High Strength Structural Steels According to Boundary Condition TMAH Etching of Silicon Wafer for Detector Fabrication Phase-Shifted Bragg Gratings Based on Hybrid Plasmonics Structure Surface Enhanced Raman Scattering Based on Dielectric-Loaded Surface Plasmon Polariton Waveguides A Novel System for Fine Particle Concentration Measurement Polymerization of Acrylamide Photo Initiated by Ferroferric Oxide Nanoparticles The Drug Loading Thermodynamics Mechanism of Eight Cationic Drugs' Adsorption onto Ion Exchange Fiber Removal of Heavy Metal Ions with Hacac-Silica Investigation of Room Temperature Photoluminescence of ZnO Films Induced by Different Laser Fluence Irradiation The Desalination Device Using the Rising Liquid Film on the Microscale Fluted Surface of Horizontal Tubes Long-Range Air-Hole Assisted Subwavelength Waveguides: Towards Large-Scale Photonic Integration Chapter 2: MEMS Design and Production A Novel Filtering Method for the Random Drift of MEMS Gyroscope Research on a Novel Compensation Algorithm for MEMS Sub-Pixel Displacement Measurement The Impact Response Characteristics Research of the Multilayer Structure, Cantilever-Type Electrothermal Actuator Based on MEMS Theoretical Method Research on a MEMS Safety and Arming Device Simulation Research on Micro-Milling Process Based on ABAQUS RF MEMS for Reconfigurable RF Front-End: Research in Australia Design of Projection Lithography Objective Lens with Sub-Ten Micrometer Line-Width and its MTF Experimental Measurements

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Details

  • NCID
    BB16368212
  • ISBN
    • 9783038350477
  • Country Code
    sz
  • Title Language Code
    eng
  • Text Language Code
    eng
  • Place of Publication
    Durnten-Zurich
  • Pages/Volumes
    viii, 118 p.
  • Size
    24 cm
  • Parent Bibliography ID
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