Material science and MEMS production : selected, peer reviewed papers from the 2014 Conference on MEMS and Nanotechnology (MEMS-NANO 2014), January 23-24, 2014, Shenzhen, China
著者
書誌事項
Material science and MEMS production : selected, peer reviewed papers from the 2014 Conference on MEMS and Nanotechnology (MEMS-NANO 2014), January 23-24, 2014, Shenzhen, China
（Advanced materials research, v. 901）
Trans Tech Publications, c2014
- : pbk
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注記
Includes bibliographical references and indexes
内容説明・目次
内容説明
Collection of selected, peer reviewed papers from the 2014 Conference on MEMS and Nanotechnology (MEMS-NANO 2014), January 23-24, 2014, Shenzhen, China.
The 19 papers are grouped as follows:
Chapter 1: Materials Science, Processing and Application,
Chapter 2: MEMS Design and Production
目次
Preface and Organizing Committee
Chapter 1: Materials Science, Processing and Application
Surface Effects on the Buckling of Nanowires Based on Modified Core-Shell Model
A Comparison Study of Fire Resistance of High Strength Structural Steels According to Boundary Condition
TMAH Etching of Silicon Wafer for Detector Fabrication
Phase-Shifted Bragg Gratings Based on Hybrid Plasmonics Structure
Surface Enhanced Raman Scattering Based on Dielectric-Loaded Surface Plasmon Polariton Waveguides
A Novel System for Fine Particle Concentration Measurement
Polymerization of Acrylamide Photo Initiated by Ferroferric Oxide Nanoparticles
The Drug Loading Thermodynamics Mechanism of Eight Cationic Drugs' Adsorption onto Ion Exchange Fiber
Removal of Heavy Metal Ions with Hacac-Silica
Investigation of Room Temperature Photoluminescence of ZnO Films Induced by Different Laser Fluence Irradiation
The Desalination Device Using the Rising Liquid Film on the Microscale Fluted Surface of Horizontal Tubes
Long-Range Air-Hole Assisted Subwavelength Waveguides: Towards Large-Scale Photonic Integration
Chapter 2: MEMS Design and Production
A Novel Filtering Method for the Random Drift of MEMS Gyroscope
Research on a Novel Compensation Algorithm for MEMS Sub-Pixel Displacement Measurement
The Impact Response Characteristics Research of the Multilayer Structure, Cantilever-Type Electrothermal Actuator Based on MEMS
Theoretical Method Research on a MEMS Safety and Arming Device
Simulation Research on Micro-Milling Process Based on ABAQUS
RF MEMS for Reconfigurable RF Front-End: Research in Australia
Design of Projection Lithography Objective Lens with Sub-Ten Micrometer Line-Width and its MTF Experimental Measurements
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