Low-k nanoporous interdielectrics : materials, thin film fabrications, structures and properties
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Low-k nanoporous interdielectrics : materials, thin film fabrications, structures and properties
（Novinka）（Nanotechnology science and technology series）
Nova Science Publishers, c2010
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Low-k nanoporous interdielectrics : materials, thin film fabrications...
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Includes bibliographical references (p. [51]-61) and index
