Spreading resistance analysis for silicon layers with nonuniform resistivity

著者

    • Dickey, David H.
    • Ehrstein, James R.

書誌事項

Spreading resistance analysis for silicon layers with nonuniform resistivity

David H. Dickey and James R. Ehrstein

(NBS special publication, 400-48 . Semiconductor measurement technology)

U.S. G.P.O., 1979

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  • NBS special publication

    Planning Office, National Bureau of Standards, U.S. Dept. of Commerce , For sale by the Supt. of Docs., U.S. Govt. Print. Off

    426, Suppl. 1

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