Photomask and X-ray mask technology VI : 13-14 April 1999, Yokohama, Japan

著者

書誌事項

Photomask and X-ray mask technology VI : 13-14 April 1999, Yokohama, Japan

Hiraoki Morimoto, editor ; sponsored by Photomask Japan, BACUS, [and] SPIE--the International Society for Optical Engineering ; cooperating organizations, Japan Society of Applied Physics ... [et al.]

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 3748）

SPIE, c1999

  • : pbk

大学図書館所蔵 件 / 全1件

この図書・雑誌をさがす

注記

Includes bibliographical references and author index

関連文献： 1件中  1-1を表示

  • Proceedings

    SPIE -- the International Society for Optical Engineering

    SPIE -- the International Society for Optical Engineering

詳細情報

ページトップへ