Semiconductor gas sensors

Author(s)
    • Jaaniso, Raivo
    • Tan, Ooi Kiang
Bibliographic Information

Semiconductor gas sensors

edited by Raivo Jaaniso and Ooi Kiang Tan

(Woodhead Publishing series in electronic and optical materials, no. 38)

Woodhead Publishing, 2013

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Includes bibliographical references and index

Description and Table of Contents

Description

Semiconductor gas sensors have a wide range of applications in safety, process control, environmental monitoring, indoor or cabin air quality and medical diagnosis. This important book summarises recent research on basic principles, new materials and emerging technologies in this essential field. The first part of the book reviews the underlying principles and sensing mechanisms for n- and p-type oxide semiconductors, introduces the theory for nanosize materials and describes the role of electrode-semiconductor interfaces. The second part of the book describes recent developments in silicon carbide- and graphene-based gas sensors, wide bandgap semiconductor gas sensors and micromachined and direct thermoelectric gas sensors. Part 3 discusses the use of nanomaterials for gas sensing, including metal oxide nanostructures, quantum dots, single-alled carbon nanotubes and porous silicon. The final part of the book surveys key applications in environmental monitoring, detecting chemical warfare agents and monitoring gases such as carbon dioxide. Semiconductor gas sensors is a valuable reference work for all those involved in gas monitoring, including those in the building industry, environmental engineers, defence and security specialists and researchers in this field.

Table of Contents

Contributor contact details Woodhead Publishing Series in Electronic and Optical Materials Part I: Introduction Chapter 1: Fundamentals of semiconductor gas sensors Abstract: 1.1 Introduction 1.2 Classification of semiconductor gas sensors 1.3 Resistor type sensors: empirical aspects 1.4 Resistor type sensors: theoretical aspects 1.5 Non-resistive sensors 1.6 Future trends Chapter 2: Conduction mechanism in semiconducting metal oxide sensing films: impact on transduction Abstract: 2.1 Introduction 2.2 General discussion about sensing with semiconducting metal oxide gas sensors 2.3 Sensing and transduction for p- and n-type semiconducting metal oxides 2.4 Investigation of the conduction mechanism in semiconducting metal oxide sensing layers: studies in working conditions 2.5 Conclusion and future trends Chapter 3: Electrode materials and electrode-oxide interfaces in semiconductor gas sensors Abstract: 3.1 Introduction 3.2 Electrode materials for semiconductor gas sensors 3.3 Electrode-oxide semiconductor interfaces 3.4 Charge carrier transport in the electrode-oxide semiconductor interfaces 3.5 Gas/solid interactions in the electrode-oxide semiconductor interfaces 3.6 Conclusion Part II: Advanced sensing methods and structures Chapter 4: Recent trends in silicon carbide (SiC) and graphene-based gas sensors Abstract: 4.1 Introduction 4.2 Background: transduction and sensing mechanisms 4.3 Recent material developments for improved selectivity of SiC gas sensors 4.4 Dynamic sensor operation 4.5 Novel SiC and graphene-based sensor devices 4.6 Conclusion Chapter 5: Recent advances in wide bandgap semiconductor-based gas sensors Abstract: 5.1 Introduction 5.2 Gas sensing 5.3 Hydrogen sensing 5.4 GaN Schottky diode sensor 5.5 Nanostructured wide bandgap materials 5.6 Silicon carbide Schottky diode hydrogen sensor 5.7 Wireless sensor network development 5.8 Conclusion 5.9 Acknowledgments Chapter 6: Micromachined semiconductor gas sensors Abstract: 6.1 Introduction 6.2 A brief history of semiconductors as gas sensitive devices 6.3 Micro-hotplate concept and technologies 6.4 Micromachined metal-oxide gas sensors 6.5 Complementary metal-oxide semiconductor (CMOS)-compatible metal-oxide gas sensors 6.6 Micromachined field-effect gas sensors 6.7 Trends and perspectives 6.8 Conclusion Chapter 7: Semiconducting direct thermoelectric gas sensors Abstract: 7.1 Introduction 7.2 Direct thermoelectric gas sensors 7.3 Conclusion and future trends Part III: Nanomaterials for gas sensing Chapter 8: One- and two-dimensional metal oxide nanostructures for chemical sensing Abstract: 8.1 Introduction 8.2 Deposition techniques 8.3 Conductometric sensor 8.4 Transduction principles and related novel devices 8.5 Conclusion and future trends Chapter 9: Semiconductor quantum dots for photoluminescence-based gas sensing Abstract: 9.1 Introduction 9.2 Quantum dot synthesis, surface functionalization and polymer encapsulation 9.3 Quantum dots for sensing: dependence of detection limits and selectivity on surface-modifying ligands 9.4 Quantum dot-polymer system 9.5 Quantum dot-nanopore array system 9.6 Conclusion and future trends 9.7 Acknowledgments Chapter 10: Coated and functionalised single-walled carbon nanotubes (SWCNTs) as gas sensors Abstract: 10.1 Introduction 10.2 Gas sensor architecture 10.3 Gas sensing mechanisms 10.4 Routes towards sensor selectivity 10.5 Applications 10.6 Conclusion Chapter 11: Carbon nanotube and metal oxide hybrid materials for gas sensing Abstract: 11.1 Introduction 11.2 Fabrication and synthesis of carbon nanotube-metal oxide sensing devices 11.3 Preparation of carbon nanotube-metal oxide sensing films 11.4 Sensor assembly 11.5 Characterization of carbon nanotube-metal oxide materials 11.6 Sensing mechanism of carbon nanotube-metal oxide gas sensors 11.7 Conclusion Chapter 12: Porous silicon gas sensors Abstract: 12.1 Introduction 12.2 Conductivity and capacitance sensors 12.3 Luminescence from PSi 12.4 Optical and photo properties of PSi sensors 12.5 PSi noise sensors 12.6 Different PSi gas sensors 12.7 Conclusion Part IV: Applications of semiconductor gas sensors Chapter 13: Metal oxide semiconductor gas sensors in environmental monitoring Abstract: 13.1 Introduction 13.2 Sensor synthesis methods 13.3 Metal oxide semiconductors in detecting environmentally important gases 13.4 Advances in carbon monoxide sensors 13.5 Advances in carbon dioxide sensors 13.6 Advances in nitrogen oxides sensors 13.7 Future trends 13.8 Conclusion 13.9 Sources of further information and advice Chapter 14: Semiconductor gas sensors for chemical warfare agents Abstract: 14.1 Introduction 14.2 Chemical warfare agents 14.3 Chemical warfare agent detecting techniques 14.4 Device preparation 14.5 Sensing properties 14.6 Conclusion Chapter 15: Integrated complementary metal oxide semiconductor-based sensors for gas and odour detection Abstract: 15.1 Introduction 15.2 Micro-resistive complementary metal oxide semiconductor gas sensors 15.3 Micro-calorimetric complementary metal oxide semiconductor gas sensor 15.4 Sensing materials and their deposition on complementary metal oxide semiconductor gas sensors 15.5 Interface circuitry and its integration 15.6 Integrated multi-sensor and sensor array systems 15.7 Conclusion and future trends 15.8 Useful web addresses Chapter 16: Solid-state sensors for carbon dioxide detection Abstract: 16.1 Introduction 16.2 Electrochemical sensors 16.3 Impedimetric, capacitive and resistive sensors 16.4 Field effect transistor sensors 16.5 New approaches to enhance sensor performance 16.6 Conclusion and future trends Index

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