EMLC 2007 : 23rd european mask and lithography conference : 22-25 January 2007, Grenoble, France

著者

• European Mask and Lithography Conference
• Behringer, Uwe F. W.
• VDE/VDI-Gesellschaft für Mikroelektronik, Mikro- und Feinwerktechnik
• CEA-LETI
• Society of Photo-optical Instrumentation Engineers

書誌事項

EMLC 2007 : 23rd european mask and lithography conference : 22-25 January 2007, Grenoble, France

Uwe F.W. Behringer, chair/editor ; organized by VDE/VDI GMM--the Society for Microelectronics, Micro- and Precision Engineering (Germany) ; cooperating organizations, CEA-LETI (France) ... [et al.] ; published by SPIE--the International Society for Optical Engineering

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 6533）

SPIE, c2007

タイトル別名

Twenty third European mask and lithography conference

注記

Includes bibliographical references and author index

詳細情報

• NII書誌ID(NCID): BC02384761
• ISBN:
  • 9780819466556
• LCCN: 2007299339
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Bellingham, Wash.,
• ページ数/冊数: 1 v. (various pagings)
• 大きさ: 28 cm
• 分類:
  • LCC : TK7872.M3
  • DC22 : 621.3815/31
• 件名:
  • LCSH : Integrated circuits -- Masks -- Congresses
  • LCSH : Microlithography -- Congresses
• 親書誌ID:
  • BA0022700X