Integrated circuit metrology, inspection, and process control IX : 20-22 February 1995, Santa Clara, California

著者

• Integrated Circuit Metrology, Inspection, and Process Control Symposium
• Bennett, Marylyn Hoy
• Society of Photo-optical Instrumentation Engineers
• Semiconductor Equipment and Materials International

書誌事項

Integrated circuit metrology, inspection, and process control IX : 20-22 February 1995, Santa Clara, California

Marylyn H. Bennett, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, SEMI--Semiconductor Equipment and Materials International

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 2439）

SPIE, c1995

• pbk.

タイトル別名

Integrated circuit metrology, inspection, and process control 9

注記

Includes bibliographical references and author index

詳細情報

• NII書誌ID(NCID): BC06573289
• ISBN:
  • 0819417874
• LCCN: 94069902
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Bellingham, Wash., USA
• ページ数/冊数: xi, 514 p.
• 大きさ: 28 cm
• 分類:
  • LCC : TK7874
  • DC20 : 621.3815/31
• 件名:
  • LCSH : Integrated circuits -- Inspection -- Congresses
  • LCSH : Integrated circuits -- Measurement -- Congresses
  • LCSH : Process control -- Congresses
  • LCSH : Optical measurements -- Congresses
  • LCSH : Scanning electron microscopes -- Congresses
• 親書誌ID:
  • BA0022700X