Microlithography and metrology in micromachining : 23-24 October, 1995, Austin, Texas

著者

• Postek, Michael T.
• Semiconductor Equipment and Materials Institute
• United States. National Institute of Standards and Technology
• Society of Photo-optical Instrumentation Engineers

書誌事項

Microlithography and metrology in micromachining : 23-24 October, 1995, Austin, Texas

Michael T. Postek, chair/editor ; sponsored by SEMI--Semiconductor Equipment and Materials International, NIST--National Institute of Standards and Technology, SPIE--the International Society for Optical Engineering

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 2640）

SPIE, c1995

注記

Includes bibliographic references and author index

詳細情報

• NII書誌ID(NCID): BC06604779
• ISBN:
  • 0819420069
• LCCN: 95070375
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Bellingham, Wash., USA
• ページ数/冊数: ix, 246 p.
• 大きさ: 28 cm
• 分類:
  • LCC : TJ1191.5
  • DC21 : 621.3815/2
• 件名:
  • LCSH : Micromachining -- Congresses
  • LCSH : Microlithography -- Congresses
  • LCSH : Measurement -- Congresses
• 親書誌ID:
  • BA0022700X