ID:DA0291497X
S.E.M.I
Mountain View, Calif. Semiconductor Equipment and Materials Institute
Semi
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[co-sponsored by Semiconductor Equipment and Materials International, Components, Packaging, & Manufacturing Technology Society, IEEE Networking the World]
IEEE Service Center c2003
Available at 1 libraries
セミコン関西ULSI技術セミナープログラム委員会編
SEMI 1999.10 第2版
Available at 2 libraries
SEMIジャパン 1998.12
Michael T. Postek, chair/editor ; sponsored by SEMI--Semiconductor Equipment and Materials International, NIST--National Institute of Standards and Technology, SPIE--the International Society for Optical Engineering
SPIE c1995 Proceedings / SPIE -- the International Society for Optical Engineering v. 2640
SEMI [1988?]