Micromachined devices and components : 23-24 October, 1995, Austin, Texas

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Micromachined devices and components : 23-24 October, 1995, Austin, Texas

Ray Roop, Kevin Chau, chairs/editors ; sponsored by SEMI--Semiconductor Equipment and Materials International, NIST--National Institute of Standards and Technology, SPIE--the International Society for Optical Engineering

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 2642）

SPIE, c1995

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Includes bibliographic references and index

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  • Proceedings

    SPIE -- the International Society for Optical Engineering

    SPIE -- the International Society for Optical Engineering

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