16th Annual Symposium on Photomask Technology and Management : proceedings, 18-20 September 1996, Redwood City, California

著者

• Symposium on Photomask Technology and Management
• Shelden, Gilbert V.
• Reynolds, James A.
• BACUS (Technical group)
• Society of Photo-optical Instrumentation Engineers

書誌事項

16th Annual Symposium on Photomask Technology and Management : proceedings, 18-20 September 1996, Redwood City, California

Gilbert V. Shelden, James A. Reynolds., chairs/editors ; sponsored by BACUS

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 2884）

SPIE, c1996

• pbk.

注記

Includes bibliographical references and index

詳細情報

• NII書誌ID(NCID): BC06860305
• ISBN:
  • 0819422827
• LCCN: 96069366
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Bellingham, Wash.
• ページ数/冊数: x, 586 p.
• 大きさ: 28 cm
• 分類:
  • LCC : TK7874
• 件名:
  • LCSH : Integrated circuits -- Masks -- Congresses
  • LCSH : Microlithography -- Congresses
• 親書誌ID:
  • BA0022700X