16th Annual Symposium on Photomask Technology and Management : proceedings, 18-20 September 1996, Redwood City, California

Author(s)

• Symposium on Photomask Technology and Management
• Shelden, Gilbert V.
• Reynolds, James A.
• BACUS (Technical group)
• Society of Photo-optical Instrumentation Engineers

Bibliographic Information

16th Annual Symposium on Photomask Technology and Management : proceedings, 18-20 September 1996, Redwood City, California

Gilbert V. Shelden, James A. Reynolds., chairs/editors ; sponsored by BACUS

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 2884）

SPIE, c1996

• pbk.

Note

Includes bibliographical references and index

Details

• NCID: BC06860305
• ISBN:
  • 0819422827
• LCCN: 96069366
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Bellingham, Wash.
• Pages/Volumes: x, 586 p.
• Size: 28 cm
• Classification:
  • LCC : TK7874
• Subject Headings:
  • LCSH : Integrated circuits -- Masks -- Congresses
  • LCSH : Microlithography -- Congresses
• Parent Bibliography ID:
  • BA0022700X