Micromachined devices and components III : 29 September 1997, Austin, Texas

著者

• Chau, Kevin
• French, Patrick J.
• Society of Photo-optical Instrumentation Engineers
• Semiconductor Equipment and Materials International
• United States. National Institute of Standards and Technology

書誌事項

Micromachined devices and components III : 29 September 1997, Austin, Texas

Kevin Chau, Patrick J. French, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, SEMI--Semiconductor Equipment and Materials International, [and] NIST--National Institute for Standards and Technology

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 3224）

SPIE, c1997

タイトル別名

Micromachined devices and components 3

Micromachined devices and components three

注記

Includes bibliographical references and index

詳細情報

• NII書誌ID(NCID): BC06946036
• ISBN:
  • 0819426563
• LCCN: 98122098
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Bellingham, Wash., USA
• ページ数/冊数: ix, 382 p.
• 大きさ: 28 cm
• 分類:
  • LCC : TJ163
  • DC21 : 621.3815/2
• 件名:
  • LCSH : Electromechanical devices -- Congresses
  • LCSH : Micromechanics -- Congresses
  • LCSH : Micromachining -- Congresses
• 親書誌ID:
  • BA0022700X