Multilevel interconnect technology II : 23-24 September, Santa Clara, California

著者

• Graef, Mart
• Patel, Divyesh N.
• Society of Photo-optical Instrumentation Engineers
• Solid State Technology (Organization)
• Electrochemical Society
• American Vacuum Society

書誌事項

Multilevel interconnect technology II : 23-24 September, Santa Clara, California

Mart Graef, Divyseh N. Patel, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, Solid State Technology ... [et al.]

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 3508）

SPIE, c1998

タイトル別名

Multilevel interconnect technology 2

注記

Includes bibliographical references and author index

• NII書誌ID(NCID): BC07259097
• ISBN:
  • 0819429678
• LCCN: 99196349
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Bellingham, Washington
• ページ数/冊数: vii, 224 p.
• 大きさ: 28 cm
• 分類:
  • LCC : TK7874.75
  • DC21 : 621.39/5
• 件名:
  • LCSH : Integrated circuits -- Very large scale integration -- Design and construction Congresses
  • LCSH : Plasma etching Congresses
  • LCSH : Metallizing Congresses
  • LCSH : Dielectric films Congresses
• 親書誌ID:
  • BA0022700X