Microsystems metrology and inspection : 15-16 June 1999, Munich, Germany

著者

• Gorecki, Christophe
• European Optical Society
• Society of Photo-optical Instrumentation Engineers

書誌事項

Microsystems metrology and inspection : 15-16 June 1999, Munich, Germany

Christophe Gorecki, chair/editor ; sponsored by EOS--European Optical Society ... [et al.]

（Proceedings EurOpt series）（Proceedings / SPIE -- the International Society for Optical Engineering, v. 3825）

SPIE, c1999

注記

Includes bibliographical references and index

詳細情報

• NII書誌ID(NCID): BC07402667
• ISBN:
  • 081943311X
• LCCN: 00708945
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Bellingham, Wash., USA
• ページ数/冊数: v, 186 p.
• 大きさ: 28 cm
• 分類:
  • LCC : TK7874
  • DC21 : 621.381
• 件名:
  • LCSH : Microelectronics -- Congresses
  • LCSH : Microelectromechanical systems -- Congresses
  • LCSH : Optical instruments -- Industrial applications -- Congresses
  • LCSH : Interferometry -- Congresses
  • LCSH : Measurement -- Congresses
• 親書誌ID:
  • BA31190072
  • BA0022700X