Process, equipment, and materials control in integrated circuit manufacturing V : 22-23 September, 1999, Santa Clara, California

著者

書誌事項

Process, equipment, and materials control in integrated circuit manufacturing V : 22-23 September, 1999, Santa Clara, California

Anthony J. Toprac, Kim Dang, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organizations, the Electrochemical Society ... [et al.]

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 3882）

SPIE, c1999

タイトル別名

Process, equipment, and materials control in integrated circuit manufacturing 5

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注記

Includes bibliographical references and index

内容説明・目次

内容説明

These papers on the manufacture of integrated circuitry focus on the areas of process, equipment and materials control.

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    SPIE -- the International Society for Optical Engineering

    SPIE -- the International Society for Optical Engineering

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