Micromachined devices and components VI : 18-19 September 2000, Santa Clara, USA

著者

• Peeters, Eric
• Paul, Oliver
• Society of Photo-optical Instrumentation Engineers
• Semiconductor Equipment and Materials International
• Solid State Technology (Organization)
• Sandia National Laboratories

書誌事項

Micromachined devices and components VI : 18-19 September 2000, Santa Clara, USA

Eric Peeters, Oliver Paul, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SolidState Technology, [and] Sandia National Laboratories (USA)

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 4176）

SPIE, c2000

タイトル別名

Micromachined devices and components 4

注記

Includes bibliographical references and index

詳細情報

• NII書誌ID(NCID): BC07472775
• ISBN:
  • 0819438324
• LCCN: 2001267697
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Bellingham, Wash., USA
• ページ数/冊数: viii, 282 p.
• 大きさ: 28 cm
• 分類:
  • LCC : TJ163
  • DC21 : 620/.5
• 件名:
  • LCSH : Electromechanical devices -- Congresses
  • LCSH : Micromechanics -- Congresses
  • LCSH : Micromachining -- Congresses
• 親書誌ID:
  • BA0022700X