Process control and diagnostics : 18-19 September 2000, Santa Clara, USA

著者

• Miller, Michael L.
• Ashtiani, Kaihan A.
• Society of Photo-optical Instrumentation Engineers
• Solid State Technology (Organization)
• Electrochemical Society
• American Vacuum Society

書誌事項

Process control and diagnostics : 18-19 September 2000, Santa Clara, USA

Michael L. Miller, Kaihan A. Ashtiani, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organizations, SolidState Technology, the Electrochemical Society, [and] AVS--American Vacuum Society (USA)

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 4182）

SPIE, c2000

注記

Includes bibliographical references and index

詳細情報

• NII書誌ID(NCID): BC07472968
• ISBN:
  • 081943843X
• LCCN: 2002275089
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Bellingham, Wash., USA
• ページ数/冊数: ix, 374 p.
• 大きさ: 28 cm
• 分類:
  • LCC : TS156.8
  • DC21 : 670.42/7
• 件名:
  • LCSH : Process control -- Congresses
  • LCSH : Manufacturing processes -- Quality control -- Congresses
  • LCSH : Optical detectors -- Industrial applications -- Congresses
  • LCSH : Lasers -- Industrial applications -- Congresses
• 親書誌ID:
  • BA0022700X