Microsystems engineering : metrology and inspection III : 23-25 June, 2003, Munich, Germany

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書誌事項

Microsystems engineering : metrology and inspection III : 23-25 June, 2003, Munich, Germany

Christophe Gorecki, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cosponsored by, EOS--European Optical Society, WLT--Wissenschaftliche Gesellschaft Lasertechnik e.V. (Germany)

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 5145）

SPIE, c2003

タイトル別名

Metrology and inspection

Microsystems engineering : metrology and inspection 3

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注記

Includes bibliographical references and author index

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  • Proceedings

    SPIE -- the International Society for Optical Engineering

    SPIE -- the International Society for Optical Engineering

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