Nano- and micro-metrology : 16-17 June 2005, Munich, Germany

Author(s)

• Ottevaere, Heidi
• DeWolf, Peter
• Wiersma, Diederik S.
• European Optical Society
• Society of Photo-optical Instrumentation Engineers

Bibliographic Information

Nano- and micro-metrology : 16-17 June 2005, Munich, Germany

Heidi Ottevaere, Peter DeWolf, Diederik S. Wiersma; sponsored by SPIE Europe ; cooperating organizations, EOS--European Optical Society ... [et al.] ; published by SPIE--the International Society for Optical Engineering

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 5858）

SPIE, c2005

• pbk.

Other Title

Nanometrology and micrometrology

Nano and micro metrology

Note

Includes bibliographical references and author index

Details

• NCID: BC08360460
• ISBN:
  • 0819458589
• LCCN: 2005284352
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Bellingham, Wash.
• Pages/Volumes: 1 v. (various pagings)
• Size: 28 cm
• Classification:
  • LCC : QC367
  • DC22 : 681/.25
• Subject Headings:
  • LCSH : Optical measurements -- Congresses
• Parent Bibliography ID:
  • BA0022700X