Nano- and micro-metrology : 16-17 June 2005, Munich, Germany

著者

• Ottevaere, Heidi
• DeWolf, Peter
• Wiersma, Diederik S.
• European Optical Society
• Society of Photo-optical Instrumentation Engineers

書誌事項

Nano- and micro-metrology : 16-17 June 2005, Munich, Germany

Heidi Ottevaere, Peter DeWolf, Diederik S. Wiersma; sponsored by SPIE Europe ; cooperating organizations, EOS--European Optical Society ... [et al.] ; published by SPIE--the International Society for Optical Engineering

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 5858）

SPIE, c2005

• pbk.

タイトル別名

Nanometrology and micrometrology

Nano and micro metrology

注記

Includes bibliographical references and author index

詳細情報

• NII書誌ID(NCID): BC08360460
• ISBN:
  • 0819458589
• LCCN: 2005284352
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Bellingham, Wash.
• ページ数/冊数: 1 v. (various pagings)
• 大きさ: 28 cm
• 分類:
  • LCC : QC367
  • DC22 : 681/.25
• 件名:
  • LCSH : Optical measurements -- Congresses
• 親書誌ID:
  • BA0022700X