Device and process technologies for microelectronics, MEMS, photonics, and nanotechnology IV : 5-7 December 2007, Canberra, Australia

Author(s)

• Tan, Hark Hoe
• Society of Photo-optical Instrumentation Engineers
• Australian National University
• Australian National University. Research School of Physical Sciences
• University of Adelaide. Centre for Biomedical Engineering

Bibliographic Information

Device and process technologies for microelectronics, MEMS, photonics, and nanotechnology IV : 5-7 December 2007, Canberra, Australia

Hark Hoe Tan ... [et al.], editors ; sponsored by SPIE ; cosponsored by the Australian National University (Australia) ... [et al.] ; cooperating organizations, Research School of Physical Sciences and Engineering, Canberra (Australia) [and] Centre for Biomedical Engineering, Adelaide (Australia)

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 6800）

SPIE, c2008

Other Title

Device and process technologies for microelectronics, MEMS, photonics, and nanotechnology 4

Device and process technologies for MEMS, microelectronics, and photonics

Note

Earlier conferences have title: Device and process technologies for MEMS, microelectronics, and photonics

Includes bibliographical references and index

Details

• NCID: BC08646099
• ISBN:
  • 9780819469717
• LCCN: 2010483564
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Bellingham, Wash.
• Pages/Volumes: 1 v. (various pagings)
• Size: 28 cm
• Classification:
  • LCC : TK7875
  • DC22 : 621.381
• Subject Headings:
  • LCSH : Microelectromechanical systems -- Congresses
  • LCSH : Photonics -- Congresses
  • LCSH : Photomechanical processes -- Congresses
  • LCSH : Photolithography -- Congresses
  • LCSH : Nanotechnology -- Congresses
• Parent Bibliography ID:
  • BA0022700X