MOEMS and miniaturized systems III : 27-29 January 2003, San Jose, California, USA

Author(s)

• Smith, James H.
• Krulevitch, Peter A.
• Lakner, Hubert K.
• Society of Photo-optical Instrumentation Engineers
• Semiconductor Equipment and Materials International
• Solid State Technology (Organization)
• Sandia National Laboratories

Bibliographic Information

MOEMS and miniaturized systems III : 27-29 January 2003, San Jose, California, USA

James H. Smith, Peter A. Krulevitch, Hubert K. Lakner, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SolidState Technology, [and] Scandia National Laboratories (USA)

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 4983）

SPIE, c2003

Other Title

Microelectromechanical systems and miniaturized systems III

MOEMS and miniaturized systems 3

Note

Includes bibliographical references and index

• NCID: BC08845404
• ISBN:
  • 0819447838
• LCCN: 2003544708
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Bellingham, Wash., USA
• Pages/Volumes: xlvi, 368 p.
• Size: 28 cm
• Classification:
  • LCC : TK7874
  • DC22 : 621.381
• Subject Headings:
  • LCSH : Microelectromechanical systems -- Congresses
  • LCSH : Miniature electronic equipment -- Congresses
  • LCSH : Micromechanics -- Congresses
  • LCSH : Optics, Adaptive -- Congresses
  • LCSH : Optical scanners -- Congresses
• Parent Bibliography ID:
  • BA0022700X