Graphene and VLSI interconnects
Author(s)
Bibliographic Information
Graphene and VLSI interconnects
Jenny Stanford Publishing, c2022
- : hardcover
Available at 2 libraries
  Aomori
  Iwate
  Miyagi
  Akita
  Yamagata
  Fukushima
  Ibaraki
  Tochigi
  Gunma
  Saitama
  Chiba
  Tokyo
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  Niigata
  Toyama
  Ishikawa
  Fukui
  Yamanashi
  Nagano
  Gifu
  Shizuoka
  Aichi
  Mie
  Shiga
  Kyoto
  Osaka
  Hyogo
  Nara
  Wakayama
  Tottori
  Shimane
  Okayama
  Hiroshima
  Yamaguchi
  Tokushima
  Kagawa
  Ehime
  Kochi
  Fukuoka
  Saga
  Nagasaki
  Kumamoto
  Oita
  Miyazaki
  Kagoshima
  Okinawa
  Korea
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  United Kingdom
  Germany
  Switzerland
  France
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Note
Includes bibliographical references and index
Description and Table of Contents
Description
Discusses the method to grow not only graphene over Cu but also allows the reader to know how to optimize graphene growth, using statistical design of experiments, on Cu interconnects in order to obtain good-quality and reliable interconnects
Provides the basic understanding of graphene-Cu interaction mechanism
Introduces a novel graphene growth process and graphene-assisted electroless copper plating
Table of Contents
1. Introduction 2. Graphene Synthesis Methods 3. Novel and Improved Graphene Synthesis Method 4.Statistical Approach to Identify Key Growth Parameters of the Novel Graphene Growth PVD Processes 5. Copper-Graphene Interconnect
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