MEMS/MOEMS technologies and applications : 17-18 October, 2002, Shanghai, China

Author(s)

• Jin, Guofan
• McKillop, John S.
• Hane, Kazuhiro
• Society of Photo-optical Instrumentation Engineers
• Chinese Optical Society
• 上海交通大学 シャンハイ コウツウ ダイガク shang hai jiao tong da xue
• National Natural Science Foundation of China

Bibliographic Information

MEMS/MOEMS technologies and applications : 17-18 October, 2002, Shanghai, China

Guofan Jin, John S. McKillop, Kazuhiro Hane, chairs/editors ; sponsored by, SPIE--the International Society for Optical Engineering, COS--Chinese Optical Society ; cooperating organizations, Shanghai Jiaotong University (China) ... [et al.] ; supported by, National Natural Science Foundation of China ... [et al.] ; published by, SPIE--the International Society for Optical Engineering

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 4928）

SPIE, c2002

Other Title

MOEMS technologies and applications

Note

Includes bibliographic references and author index

• NCID: BC16158851
• ISBN:
  • 081944717X
• LCCN: 2003265092
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Bellingham, Washington
• Pages/Volumes: ix, 302 p.
• Size: 28 cm
• Classification:
  • LCC : TK7875
  • DC21 : 621.381
• Subject Headings:
  • LCSH : Microelectromechanical systems -- Congresses
  • LCSH : Optoelectronic devices -- Congresses
• Parent Bibliography ID:
  • BA0022700X