MEMS, MOEMS, and micromachining III : 9-10 April 2008, Strasbourg, France

著者

• Urey, Hakan
• SPIE Europe
• Alsace international
• Association française des industries de l'optique et de la photonique
• Society of Photo-optical Instrumentation Engineers

書誌事項

MEMS, MOEMS, and micromachining III : 9-10 April 2008, Strasbourg, France

Hakan Urey, editor ; sponsored by SPIE Europe ; cosponsored by Alsace international (France) ... [et al.] ; cooperating organizations, AFOP--Association française des industries de l'optique et de la photonique (France) ... [et al.]

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 6993）

SPIE, c2008

タイトル別名

MEMS, MOEMS, and micromachining 3

注記

Includes bibliographical references and index

詳細情報

• NII書誌ID(NCID): BC16159628
• ISBN:
  • 9780819471918
• LCCN: 2010287768
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Bellingham, Wash.
• ページ数/冊数: 1 v. (various pagings)
• 大きさ: 28 cm
• 分類:
  • LCC : TK7875
  • DC22 : 621
• 件名:
  • LCSH : Microelectromechanical systems -- Congresses
  • LCSH : Optoelectronic devices -- Congresses
  • LCSH : Micromachining -- Congresses
• 親書誌ID:
  • BA0022700X