EMLC 2008 : 24th European Mask and Lithography Conference : 21-24 January 2008, Dresden, Germany

著者

• European Mask and Lithography Conference
• Behringer, Uwe F. W.
• Maurer, Wilhelm
• Waelpoel, Jacques
• VDE/VDI GMM. Society for Microelectronics, Micro- and Precision Engineering
• BACUS (Technical group)
• Society of Photo-optical Instrumentation Engineers

書誌事項

EMLC 2008 : 24th European Mask and Lithography Conference : 21-24 January 2008, Dresden, Germany

Uwe F.W. Behringer, chair/editor ; Wilhelm Maurer, Jacques Waelpoel, program chairs ; organized by VDE/VDI GMM--the Society for Microelectronics, Micro- and Precision Engineering (Germany) ; cooperating organizations, BACUS ... [et al.]

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 6792）

SPIE, c2008

タイトル別名

European Mask and Lithography Conference 2008

24th European Mask and Lithography Conference

注記

Includes bibliographical references and author index

詳細情報

• NII書誌ID(NCID): BC16222349
• ISBN:
  • 9780819469564
• LCCN: 2010287113
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Bellingham, Wash.,
• ページ数/冊数: 1 v. (various pagings)
• 大きさ: 28 cm
• 分類:
  • LCC : TK7872.M3
• 件名:
  • LCSH : Integrated circuits -- Masks -- Congresses
  • LCSH : Microlithography -- Congresses
• 親書誌ID:
  • BA0022700X