ID:DA08910530
Society of Photo-Opticl Instrumentation Engineers. BACUS
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sponsored by BACUS--the International Technical Group of SPIE dedicated to the advancement of photomask technology
SPIE c1994 Proceedings / SPIE -- the International Society for Optical Engineering v. 2087
pbk.
Available at 3 libraries
SPIE c1993 Proceedings / SPIE -- the International Society for Optical Engineering v. 1809
Available at 2 libraries
SPIE c1992 Proceedings / SPIE -- the International Society for Optical Engineering v. 1604