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Brian J. Grenon, Giang T. Dao,chairs/editors ; sponsored by BACUS--the International Technical Group of SPIE dedicated to the advancement of photomask technology, SPIE--the International Sociey for Optical Engineering ; published by SPIE--the International Society for Optical Engineering
SPIE c2001 Proceedings / SPIE -- the International Society for Optical Engineering v. 4186
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sponsored by BACUS--the International Technical Group of SPIE dedicated to the advancement of photomask technology
SPIE c1992 Proceedings / SPIE -- the International Society for Optical Engineering v. 1604
Available at 2 libraries