ID:DA1955321X
Motooka, Teruaki
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edited by Markku Tilli ... [et al.]
Elsevier c2020 3rd ed Micro and nano technologies series
pbk.
Available at 3 libraries
by Veikko Lindroos ... [et al.]
William Andrew 2010 Micro & nano technologies
: hbk
Available at 4 libraries
