Journal of vacuum science & technology. 2nd series B, Microelectronics processing and phenomena : an official journal of the American Vacuum Society

Author(s)

Bibliographic Information

Journal of vacuum science & technology. 2nd series B, Microelectronics processing and phenomena : an official journal of the American Vacuum Society

American Institute of Physics, 1983-1990

  • Vol. 1, no. 1 (Jan./Mar. 1983)-v. 8, no. 6 (Nov./Dec. 1990)

Other Title

J. vac. sci. technol., B, Microelectronics process. phenom

Journal of vacuum science & technology. B, Microelectronics processing and phenomena

Journal of vacuum science and technology. B, Microelectronics processing and phenomena

Microelectronics processing and phenomena

Available at  / 104 libraries

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Note

Title from cover

Issued also on microfilm

Continues:1

Details

  • NCID
    AA10635106
  • ISSN
    0734211X
  • LCCN
    83642371
  • Country Code
    us
  • Title Language Code
    eng
  • Text Language Code
    eng
  • Place of Publication
    New York
  • Publication Status
    Dead Status
  • Frequency
    Bimonthly
  • Regularity
    Regular
  • Type of Continuing Resource
    Periodical
  • Bibliographic History ID
    30085200
  • CODEN
    JVTBD9
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