Journal of vacuum science & technology. 2nd series B, Microelectronics processing and phenomena : an official journal of the American Vacuum Society
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Bibliographic Information
Journal of vacuum science & technology. 2nd series B, Microelectronics processing and phenomena : an official journal of the American Vacuum Society
American Institute of Physics, 1983-1990
- Vol. 1, no. 1 (Jan./Mar. 1983)-v. 8, no. 6 (Nov./Dec. 1990)
- Other Title
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J. vac. sci. technol., B, Microelectronics process. phenom
Journal of vacuum science & technology. B, Microelectronics processing and phenomena
Journal of vacuum science and technology. B, Microelectronics processing and phenomena
Microelectronics processing and phenomena
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Issued also on microfilm