Journal of vacuum science & technology. Second series. B, Microelectronics and nanometer structures, processing, measurement and phenomena

Author(s)

Bibliographic Information

Journal of vacuum science & technology. Second series. B, Microelectronics and nanometer structures, processing, measurement and phenomena

American Institute of Physics, 1991-

  • Vol. 9, no. 1 (Jan./Feb. 1991)-

Other Title

Journal of vacuum science and technology. B, 2nd series. Nanotechnology & microelectronics: mateials, processing, mesurement, & phenomena

JVSTB, Nanotechnology & microelectronics

Available at  / 124 libraries

Search this Book/Journal

Details

  • NCID
    AA10804928
  • ISSN
    21662746
  • Country Code
    us
  • Title Language Code
    eng
  • Text Language Code
    eng
  • Place of Publication
    New York
  • Publication Status
    Currently Published Status
  • Frequency
    Bimonthly
  • Regularity
    Regular
  • Type of Continuing Resource
    Periodical
  • Bibliographic History ID
    30085200
  • CODEN
    JVTBD9
Page Top