Journal of vacuum science & technology. Second series. B, Microelectronics and nanometer structures, processing, measurement and phenomena
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Bibliographic Information
Journal of vacuum science & technology. Second series. B, Microelectronics and nanometer structures, processing, measurement and phenomena
American Institute of Physics, 1991-
- Vol. 9, no. 1 (Jan./Feb. 1991)-
- Other Title
-
Journal of vacuum science and technology. B, 2nd series. Nanotechnology & microelectronics: mateials, processing, mesurement, & phenomena
JVSTB, Nanotechnology & microelectronics
Available at / 124 libraries
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Toyohashi University of Technology Library図1991-2013
9-16,
17(3-6), 18-21, 22(2-6), 23-28, 29(1), 30(2-6), 31(2-6) -
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