Bibliographic Information

IEEE transactions on semiconductor manufacturing : a publication of the IEEE Components, Hybrids, and Manufacturing Technology Society, the IEEE Electron Devices Society, the IEEE Reliability Society, the IEEE Solid-State Circuits Council

Institute of Electrical and Electronics Engineers

Institute of Electrical and Electronics Engineers, c1988-

  • Vol. 1, no. 1 (Feb. 1988)-

Other Title

Institute of Electrical and Electronics Engineers transactions on semiconductor manufacturing

A publication of the IEEE Components, Packaging, and Manufacturing Technology Society, the IEEE Electron Devices Society, the IEEE Reliability Society, the IEEE Solid-State Circuits Council

A publication of the IEEE Components, Packaging, and Manufacturing Technology Society, the IEEE Electron Devices Society, the IEEE Reliability Society, the IEEE Solid-State Circuits Society

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Note

Quarterly

Title from cover

Also available on microform

Other title information varies: a publication of the IEEE Components, Packaging, and Manufacturing Technology Society, the IEEE Electron Devices Society, the IEEE Reliability Society, the IEEE Solid-State Circuits Council (V. 7, no. 3 (Aug. 1994)-v. 10, no. 1 (Feb. 1997))

Other title information varies: a publication of the IEEE Components, Packaging, and Manufacturing Technology Society, the IEEE Electron Devices Society, the IEEE Reliability Society, the IEEE Solid-State Circuits Society (V. 10, no. 2 (May 1997)-)

Details

  • NCID
    AA10690454
  • ISSN
    08946507
  • LCCN
    88659341
  • Country Code
    us
  • Title Language Code
    eng
  • Text Language Code
    eng
  • Place of Publication
    New York, N.Y.
  • Publication Status
    Currently Published Status
  • Frequency
    Quarterly
  • Regularity
    Regular
  • Type of Continuing Resource
    Periodical
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