Glow discharge processes : sputtering and plasma etching
Author(s)
Bibliographic Information
Glow discharge processes : sputtering and plasma etching
（A Wiley-Interscience publication）
Wiley, c1980
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Note
Includes bibliographical references and index
Description and Table of Contents
Description
Develops detailed understanding of the deposition and etching of materials by sputtering discharge, and of etching of materials by chemically active discharge. Treats glow discharge at several levels from basic phenomena to industrial applications--practical techniques diligently related to fundamentals. Subjects range from voltage, distributions encountered in plasma etching systems to plasma-electron interactions that contribute to sustaining the discharge.
Table of Contents
Gases.
Gas Phase Collision Processes.
Plasmas.
DC Glow Discharges.
RF Discharges.
Sputtering.
Plasma Etching.
Appendices.
Index.
by "Nielsen BookData"