Physical sputtering of single-element solids
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Bibliographic Information
Physical sputtering of single-element solids
（Topics in applied physics, v. 47 . Sputtering by particle bombardment / edited by R. Behrisch ; 1）
Springer-Verlag, 1981
- : Ger
- : U.S
Available at / 49 libraries
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National Institutes of Natural Sciences Okazaki Library and Information Center図
: U.S.420.8/TO/479111094216
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Institute of Materials and Systems for Sustainability, Nagoya University未来材料研
: Ger428.4||Sp40770899
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